Automated Interferometer System

Automated Interferometer System. An interferometer system including fully-automated wafer handling equipment sufficient to enable in-line operation in the Approved Markets for Nano's Field of Use, and specifically excluding laboratory tool interferometer systems and semi-automated interferometer systems (such as those with motorized stages). The Automated Interferometer Systems can be a stand-alone metrology unit or it can be incorporated into another unit, such as a production unit to, for example, provide real-time metrology... feedback during production of a device View More